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Record Nr. |
UNINA9910872411403321 |
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Titolo |
1997 IEEE/Semi Advanced Semiconductor Manufacturing Conference and Workshop |
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Pubbl/distr/stampa |
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[Place of publication not identified], : IEEE, 1997 |
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Descrizione fisica |
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1 online resource (480 pages) |
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Disciplina |
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Soggetti |
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Process control |
Semiconductor industry |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Bibliographic Level Mode of Issuance: Monograph |
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Sommario/riassunto |
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The ASMC '97 proceedings contain premier papers on the latest advances in semiconductor manufacturing for IC manufacturing professionals. The number of papers presented has been on the incline over the past five years. |
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