|
|
|
|
|
|
|
|
1. |
Record Nr. |
UNINA9910830942803321 |
|
|
Titolo |
Micro process engineering : fundamentals, devices, fabrication, and applications |
|
|
|
|
|
|
|
Pubbl/distr/stampa |
|
|
[Place of publication not identified], : Wiley VCH, 2006 |
|
|
|
|
|
|
|
ISBN |
|
1-281-84300-8 |
9786611843007 |
3-527-61674-8 |
3-527-61696-9 |
|
|
|
|
|
|
|
|
Collana |
|
Advanced micro & nanosystems Micro process engineering |
|
|
|
|
|
|
Disciplina |
|
|
|
|
|
|
Soggetti |
|
Production engineering |
Microtechnology |
Industrial & Management Engineering |
Mechanical Engineering |
Engineering & Applied Sciences |
|
|
|
|
|
|
|
|
Lingua di pubblicazione |
|
|
|
|
|
|
Formato |
Materiale a stampa |
|
|
|
|
|
Livello bibliografico |
Monografia |
|
|
|
|
|
Note generali |
|
Bibliographic Level Mode of Issuance: Monograph |
|
|
|
|
|