1.

Record Nr.

UNINA9910817296103321

Autore

Stokes Debbie

Titolo

Principles and practice of variable pressure/environmental scanning electron microscopy (VP-ESEM) / / Debbie J. Stokes

Pubbl/distr/stampa

Chichester, U.K., : Wiley, 2008

ISBN

9786612343506

9781282343504

1282343505

9780470758731

0470758732

9780470758748

0470758740

Edizione

[1st ed.]

Descrizione fisica

1 online resource (235 p.)

Collana

RMS - Royal Microscopical Society

Classificazione

UH 6310

Disciplina

502.8/25

Soggetti

Scanning electron microscopy

Microscopy

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

"Published in association with the Royal Microscopical Society."

Nota di bibliografia

Includes bibliographical references and index.

Nota di contenuto

Principles and Practice of Variable Pressure/Environmental Scanning Electron Microscopy (VP-ESEM); Contents; Preface; 1 A Brief Historical Overview; 1.1 Scanning Electron Microscopy; 1.1.1 The Beginnings; 1.1.2 The Need for Added Capabilities; 1.2 The Development of Imaging in a Gas Environment; 1.2.1 Overcoming the Limits of Conventional SEM; 1.2.2 Leaps and Bounds; 2 Principles of SEM; 2.1 Introduction; 2.1.1 Why Use An Electron Beam?; 2.1.2 The SEM Column; 2.1.3 Why Do We Need a Vacuum System?; 2.2 Electron Sources; 2.2.1 Thermionic Emission Sources; 2.2.2 Field Emission Sources

2.3 Electron Optics2.3.1 Lenses; 2.3.2 Lens Aberrations; 2.4 Signals and Detection; 2.4.1 Primary Electrons and the Interaction Volume; 2.4.2 Backscattered Electrons; 2.4.3 Secondary Electrons; 2.4.4 X-ray Radiation; 2.4.5 Cathodoluminescence; 2.5 Practical Aspects of Electron Beam Irradiation; 2.5.1 Radiation Damage; 2.5.2 Minimising Specimen Charging - Low-Voltage SEM; 2.5.3 Increasing Surface and Bulk Conductivities; 2.6 SEM in Operation; 2.6.1 Building Up an Image; 2.6.2



Magnification; 2.6.3 Signal-to-Noise Ratio; 2.6.4 Contrast; 2.6.5 Adjusting the Contrast; 2.6.6 Resolution

2.6.7 Depth of Field2.6.8 Image Capture; 3 General Principles of VP-ESEM: Utilising a Gas; 3.1 Introduction; 3.2 VP-ESEM Instrumentation; 3.2.1 Typical Features; 3.2.2 Primary Electron Scattering in VP-ESEM - the General Case; 3.2.3 Units of Pressure; 3.3 Signal Generation in a Gas; 3.3.1 Introduction; 3.3.2 Direct Collection of Electrons and Ions; 3.3.3 Collection of Photons - the Gas Luminescence Signal; 3.3.4 Detecting Indirect Electron and Ion Currents; 3.4 Imaging with Water Vapour; 3.4.1 Introduction; 3.4.2 Thermodynamic Equilibria; 3.4.3 Nonequilibrium Conditions

3.4.4 Practicalities of Stabilising Hydrated Specimens4 Imaging and Analysis in VP-ESEM: The Influence of a Gas; 4.1 Introduction; 4.2 Background to Theoretical Calculations; 4.2.1 Calculating the Mean Free Paths of Primary Electrons; 4.2.2 Calculating Pressure-Dependent Variables; 4.2.3 Estimating the 'Useful' Primary Electron Current; 4.3 Which Gas?; 4.3.1 Introduction; 4.3.2 Usefulness of the Gas - Experimental Conditions; 4.3.3 Ionisation and Excitation for Different Gases; 4.3.4 Scattering of the Primary Electron Beam in Different Gases; 4.4 Exploring the Gas Path Length

4.4.1 Introduction4.4.2 Influence of GPL on the Skirt Radius; 4.4.3 Gas Path Length and Useful Primary Electron Beam Current; 4.4.4 Constraints on Reducing the Gas Path Length; 4.4.5 Separating Gas Path Length from Working Distance; 4.5 How Much Gas?; 4.5.1 Introduction; 4.5.2 Scattering of Primary Electrons as a Function of Pressure; 4.6 X-ray Microanalysis in VP-ESEM; 4.6.1 Introduction; 4.6.2 Effects of Chamber Gas on X-ray Signals; 4.6.3 Considerations for Minimising the Effects of the Gas; 4.6.4 Post-Acquisition Methods to Correct for Scattering

5 Imaging Uncoated Specimens in the VP-ESEM

Sommario/riassunto

Offers a simple starting point to VPSEM, especially for new users, technicians and students containing clear, concise explanationsCrucially, the principles and applications outlined in this book are completely generic: i.e. applicable to all types of VPSEM, irrespective of manufacturer.Information presented will enable reader to turn principles into practicePublished in association with the Royal Microscopical Society (RMS) -www.rms.org.uk