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Record Nr. |
UNINA9910816719503321 |
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Titolo |
CVD polymers : fabrication of organic surfaces and devices / / edited by Karen K. Gleason ; contributors Peter Baumann [and thirty six others] |
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Pubbl/distr/stampa |
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Weinheim, Germany : , : Wiley-VCH, , 2015 |
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©2015 |
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ISBN |
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3-527-69028-X |
3-527-69027-1 |
3-527-69026-3 |
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Descrizione fisica |
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1 online resource (484 p.) |
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Disciplina |
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Soggetti |
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Chemical vapor deposition |
Polymers |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Description based upon print version of record. |
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Nota di bibliografia |
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Includes bibliographical references at the end of each chapters and index. |
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Nota di contenuto |
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Cover; Contents; List of Contributors; Chapter 1 Overview of Chemically Vapor Deposited (CVD) Polymers; 1.1 Motivation and Characteristics; 1.1.1 Quality; 1.1.2 Conformality; 1.1.3 Durability; 1.1.4 Composition; 1.2 Fundamentals and Mechanisms; 1.2.1 Gas Phase and Surface Reactions; 1.2.2 The Monomer Saturation Ratio; 1.2.3 Process Simplification and Substrate Independence; 1.3 Scale-Up and Commercialization; 1.4 Process and Materials Chemistry; 1.4.1 Initiated CVD (iCVD) and Its Variants; 1.4.2 Plasma Enhanced CVD (PECVD); 1.4.3 Poly(p-xylylene) (PPX) and Its Derivatives (""Parylenes"") |
1.4.4 Oxidative CVD (oCVD)1.4.5 Vapor Deposition Polymerization (VDP) and Molecular Layer Deposition (MLD); 1.4.6 Additional Methods; 1.5 Summary; Acknowledgments; References; Part I: Fundamentals; Chapter 2 Growth Mechanism, Kinetics, and Molecular Weight; 2.1 Introduction; 2.2 iCVD Process; 2.3 Kinetics and Growth Mechanism; 2.3.1 Fluorocarbon Polymers; 2.3.2 Organosilicon Polymers; 2.3.3 Acrylate and Methacrylate Polymers; 2.3.4 Styrene and Other Vinyl Polymers; 2.3.5 Ring Opening Polymers; 2.4 Summary; References; Chapter 3 Copolymerization and Crosslinking; 3.1 Introduction |
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3.2 Copolymer Composition and Structure3.2.1 Confirmation of iCVD Copolymerization; 3.2.2 Analysis of Copolymer Composition; 3.2.3 Compositional Gradient; 3.3 Copolymerization Kinetics; 3.3.1 Copolymerization Equation and Reactivity Ratio; 3.3.2 Types of iCVD Copolymerization; 3.4 Tunable Properties of iCVD Copolymers; 3.4.1 Mechanical Properties; 3.4.2 Swelling; 3.4.3 Thermal Properties; 3.4.4 Surface Properties; 3.5 Conclusions; References; Chapter 4 Non-Thermal Initiation Strategies and Grafting; 4.1 Introduction; 4.2 Initiation Strategies; 4.2.1 Plasma Initiation Strategies |
4.2.1.1 Plasma Enhanced Chemical Vapor Deposition (PECVD)4.2.1.2 Pulsed-Plasma Enhanced Chemical Vapor Deposition (PPECVD); 4.2.1.3 Microwave Plasmas; 4.2.1.4 Initiated Plasma Enhanced Chemical Vapor Deposition (iPECVD); 4.2.1.5 Plasma Initiation Summary; 4.2.2 Photoinitiation Strategies; 4.2.2.1 Photoactive Initiator Molecules; 4.2.2.2 Photoactive Monomer Species; 4.2.2.3 Photoinitiation Summary; 4.3 Grafting; 4.3.1 Surface Modification of Organic Substrates; 4.3.2 Surface Modification of Inorganic Substrates; 4.3.3 Grafting Summary; 4.4 Summary; References; Chapter 5 Conformal Polymer CVD |
5.1 Introduction5.2 Vapor Phase Transport; 5.3 Conformal Polymer Coating Applications; 5.4 Conformal Polymer Coating Technologies; 5.5 Gas and Surface Reactions; 5.6 The Reaction-Diffusion Model; 5.6.1 Reaction and Diffusion in a Pore; 5.6.2 Initiator Controlled Consumption; 5.6.3 Factors Affecting the Initiator Sticking Probability; 5.6.4 Monomer Controlled Consumption; 5.6.5 Other Polymer CVD Systems; 5.7 Applications; 5.8 Conclusion; Acknowledgment; References |
Chapter 6 Plasma Enhanced-Chemical Vapor Deposited Polymers: Plasma Phase Reactions, Plasma-Surface Interactions, and Film Properties |
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Sommario/riassunto |
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The scope of the book are CVD (chemical vapor deposition) polymerization processes which directly translate the chemical mechanisms of traditional polymer synthesis and organic synthesis in homogeneous liquids into heterogeneous processes for the modification of solid surfaces. The book is structured into four parts, complemented by an introductory overview of the diverse process strategies for CVD of polymeric materials. The first part on the fundamentals of CVD polymers is followed by a detailed coverage of the materials chemistry of CVD polymers, including the main synthesis mechanisms and |
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