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Record Nr. |
UNINA9910815471203321 |
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Titolo |
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / / edited by Filipe Vaz, Nicolas Martin & Martin Fenker |
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Pubbl/distr/stampa |
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Sharjah, United Arab Emirates ; ; Oak Park, Illinois : , : Bentham Science Publishers, , [2013] |
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©2013 |
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ISBN |
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Descrizione fisica |
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1 online resource (363 p.) |
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Altri autori (Persone) |
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VazFilipe |
MartinNicolas |
FenkerMartin |
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Disciplina |
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Soggetti |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Description based upon print version of record. |
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Nota di bibliografia |
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Includes bibliographical references and indexes. |
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Nota di contenuto |
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Cover; Title; Contents; About the Editors; Foreword; Preface; List of Contributors; Part 1; Chapter 01; Chapter 02; Chapter 03; Part 2; Chapter 04; Chapter 05; Chapter 06; Chapter 07; Chapter 08; Part 3; Chapter 09; Chapter 10; Chapter 11; Chapter 12; Author index; Subject index |
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Sommario/riassunto |
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This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes. |
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