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Record Nr. |
UNINA9910808833503321 |
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Autore |
Khursheed Anjam |
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Titolo |
Scanning electron microscope optics and spectrometers [[electronic resource] /] / Anjam Khursheed |
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Pubbl/distr/stampa |
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Singapore ; ; Hackensack, N.J., : World Scientific Pub. Co., 2011 |
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ISBN |
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1-283-14355-0 |
9786613143556 |
981-283-668-3 |
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Descrizione fisica |
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1 online resource (400 p.) |
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Disciplina |
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Soggetti |
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Scanning electron microscopes |
Optical spectrometers |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Description based upon print version of record. |
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Nota di bibliografia |
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Includes bibliographical references and index. |
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Nota di contenuto |
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Dedication; Preface; Contents; Chapter 1 Conventional SEM Design; Chapter 2 Spectrometer Design Principles; Chapter 3 In-lens Improvements; Chapter 4 Sub-nanometer Probe Diameters; Chapter 5 Secondary Electron Spectrometers; Chapter 6 Full Range Deflector Spectrometer Designs; Chapter 7 Full Range Parallel Energy Spectrometer Designs; Chapter 8 Spectroscopic SEM proposals; Appendix 1.0 Field Expansions; Appendix 1.1 Derivation of the Paraxial Equation; Appendix 1.2 Spherical Aberration; Appendix 1.3 Chromatic Aberration; Appendix 2 Multipole Lenses; Bibliography; Index |
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Sommario/riassunto |
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This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engi |
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