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Record Nr. |
UNINA9910797570903321 |
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Titolo |
Handbook of silicon based MEMS materials and technologies [[electronic resource] /] / Veikko Lindroos ... [et al.] |
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Pubbl/distr/stampa |
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Amsterdam ; ; Boston, : William Andrew/Elsevier, 2010 |
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ISBN |
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0-8155-1988-5 |
9786612541148 |
0-08-094772-7 |
1-282-54114-5 |
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Edizione |
[1st ed.] |
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Descrizione fisica |
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1 online resource (669 p.) |
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Collana |
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Micro & nano technologies |
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Altri autori (Persone) |
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Disciplina |
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Soggetti |
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Microelectromechanical systems |
Microelectromechanical systems - Materials |
Silicon - Electric properties |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Description based upon print version of record. |
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Nota di bibliografia |
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Includes bibliographical references and index. |
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Sommario/riassunto |
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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in materials characterizationModeling in MEMSMeasuring MEMSMicromachining technologies in MEMSEncapsulation of MEMS componentsEmerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well |
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