1.

Record Nr.

UNINA9910785903303321

Titolo

Adhesion aspects in MEMS-NEMS / / edited by S. H. Kim, M. T. Dugger and K. L. Mittal

Pubbl/distr/stampa

Leiden ; ; Boston : , : Brill

Biggleswade : , : Extenza Turpin [distributor], , 2010

ISBN

0-429-08792-6

1-61583-947-X

90-04-19095-3

Descrizione fisica

1 online resource (424 p.)

Altri autori (Persone)

KimSeong H

DuggerMichael T

MittalK. L. <1945->

Disciplina

621.381

Soggetti

Microelectromechanical systems

Nanoelectromechanical systems

Adhesion

Surfaces (Technology)

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Description based upon print version of record.

Nota di bibliografia

Includes bibliographical references.

Nota di contenuto

pt. 1. Understanding through continuum theory -- pt. 2. Computer simulation of interfaces -- pt. 3. Adhesion and friction measurements -- pt. 4. Adhesion in practical applications -- pt. 5. Adhesion mitigation strategies.

Sommario/riassunto

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface