| |
|
|
|
|
|
|
|
|
1. |
Record Nr. |
UNINA9910785724803321 |
|
|
Titolo |
NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore / / edited by Lynn Khine and Julius M. Tsai |
|
|
|
|
|
|
|
Pubbl/distr/stampa |
|
|
Durnten-Zurich, Switzerland : , : Trans Tech Publications, , [2011] |
|
©2011 |
|
|
|
|
|
|
|
|
|
ISBN |
|
1-62198-685-3 |
3-03813-609-3 |
|
|
|
|
|
|
|
|
Descrizione fisica |
|
1 online resource (233 p.) |
|
|
|
|
|
|
Collana |
|
Advanced materials research, , 1022-6680 ; ; volume 254 |
|
|
|
|
|
|
Altri autori (Persone) |
|
|
|
|
|
|
|
|
Disciplina |
|
|
|
|
|
|
Soggetti |
|
Nanoelectromechanical systems |
Microelectromechanical systems |
|
|
|
|
|
|
|
|
Lingua di pubblicazione |
|
|
|
|
|
|
Formato |
Materiale a stampa |
|
|
|
|
|
Livello bibliografico |
Monografia |
|
|
|
|
|
Note generali |
|
Description based upon print version of record. |
|
|
|
|
|
|
Nota di bibliografia |
|
Includes bibliographical references and indexes. |
|
|
|
|
|
|
Nota di contenuto |
|
NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force |
A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications |
|
|
|
|
|
|
|
|
|
|
|
A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement |
Focused Ion Beam Fabricated Polystyrene-Platinum Thermal MicroactuatorLead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications; Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants; Tagging for Capsule Endoscopy Localization; The Negative π/2 Phase Shift of Total Reflect Light; High Topography Polyimide CMP Process; Hydridosilane Modification of Metals: An Exploratory Study; Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor |
Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators |
Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide |
|
|
|
|
|
|
Sommario/riassunto |
|
The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati |
|
|
|
|
|
|
|
| |