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Record Nr. |
UNINA9910781987803321 |
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Autore |
Kubby Joel A. |
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Titolo |
A guide to hands-on MEMS design and prototyping / / Joel Kubby [[electronic resource]] |
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Pubbl/distr/stampa |
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Cambridge : , : Cambridge University Press, , 2011 |
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ISBN |
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1-139-12411-0 |
1-107-21936-1 |
1-283-29560-1 |
1-139-12216-9 |
9786613295606 |
1-139-11642-8 |
1-139-11206-6 |
0-511-98466-9 |
1-139-12708-X |
1-139-11425-5 |
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Descrizione fisica |
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1 online resource (xi, 166 pages) : digital, PDF file(s) |
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Classificazione |
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Disciplina |
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Soggetti |
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Microelectromechanical systems |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Title from publisher's bibliographic system (viewed on 05 Oct 2015). |
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Nota di bibliografia |
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Includes bibliographical references and index. |
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Nota di contenuto |
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Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics. |
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Sommario/riassunto |
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Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic |
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