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Record Nr. |
UNINA9910711391803321 |
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Autore |
Bullis W. Murray |
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Titolo |
Methods of measurement for semiconductor materials, process control, and devices. / / W. Murray Bullis |
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Pubbl/distr/stampa |
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Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1968 |
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Descrizione fisica |
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Collana |
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NBS technical note ; ; 472 |
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Altri autori (Persone) |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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1968. |
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. |
Title from PDF title page. |
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Nota di bibliografia |
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Includes bibliographical references. |
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