Measurement assurance for dimensional measurements on integrated-circuit photomasks / / Carroll. Croarkin

• Record Nr.: UNINA9910711225803321
• Autore: Croarkin Carroll
• Pubbl/distr/stampa: Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1982
• Descrizione fisica: 1 online resource
• Collana: NBS technical note ; ; 1164
• Altri autori (Persone): CroarkinCarroll
• Soggetti: Integrated circuits - Masks - Measurement; Optical instruments - Calibration
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Note generali: 1982.; Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.; Title from PDF title page.
• Nota di bibliografia: Includes bibliographical references.