Calibration service for laser power and energy at 248 nm / / Rodney W. Leonhardt

• Record Nr.: UNINA9910711207003321
• Autore: Leonhardt Rodney W
• Pubbl/distr/stampa: Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1998
• Descrizione fisica: 1 online resource
• Collana: NIST technical note ; ; 1394
• Altri autori (Persone): LeonhardtRodney W
• Soggetti: Excimer lasers - Calibration; Lasers - Industrial applications
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Note generali: 1998.; Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.; Title from PDF title page.
• Nota di bibliografia: Includes bibliographical references.