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Record Nr. |
UNINA9910711191303321 |
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Autore |
Bullis W. Murray |
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Titolo |
Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry / / W. Murray Bullis, S. Perkowitz, D. G. Seiler |
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Pubbl/distr/stampa |
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Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1995 |
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Descrizione fisica |
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Collana |
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NIST special publication ; ; 400-98 |
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Altri autori (Persone) |
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BullisW. Murray |
PerkowitzSidney |
SeilerDavid G |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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1995. |
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. |
Title from PDF title page. |
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Nota di bibliografia |
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Includes bibliographical references. |
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