1.

Record Nr.

UNINA9910710535803321

Autore

Larrabee R. D

Titolo

Nondestructive evaluation activities in the Semiconductor Materials and Processes Division / / R. D. Larrabee; M. I. Bell

Pubbl/distr/stampa

Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1986

Descrizione fisica

1 online resource

Collana

NBSIR ; ; 86-3495

Altri autori (Persone)

BellMichael I

LarrabeeR. D

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

1986.

Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.

Title from PDF title page.

Nota di bibliografia

Includes bibliographical references.