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Record Nr. |
UNINA9910709941103321 |
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Titolo |
A Framework for standard modular simulation : application to semiconductor wafer fabrication / / Heshan Li [and others] |
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Pubbl/distr/stampa |
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[Gaithersburg, MD] : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , [2005] |
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Descrizione fisica |
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1 online resource (17 pages) : illustrations |
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Collana |
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Altri autori (Persone) |
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FernandezEmmanuel |
LeongSwee K |
LiHeshan |
McLeanCharles R (Charles Robert) |
Ramirez-HernandezJose A |
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Soggetti |
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Semiconductor wafers - Standards |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. |
Title from page 1, viewed April 6, 2007. |
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Nota di bibliografia |
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Includes bibliographical references. |
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