1.

Record Nr.

UNINA9910709940803321

Titolo

Workshop summary report : scanning probe nanolithography workshop / / John A. Dagata, Hiroshi Yokoyama, Francesc Perez-Murano

Pubbl/distr/stampa

[Gaithersburg, MD] : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , [2003]

Descrizione fisica

1 online resource (86 pages) : illustrations

Collana

NISTIR ; ; 7040

Altri autori (Persone)

DagataJohn A

Perez-MuranoFrancesc

YokoyamaHiroshi

Soggetti

Nanoelectronics

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

"January 2003."

Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.

Title from page [1], viewed April 6, 2007.

Nota di bibliografia

Includes bibliographical references.