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Record Nr. |
UNINA9910709939003321 |
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Titolo |
Implementation of simulation program for modeling the effective resistivity of nanometer scale film and line interconnects / / A. Emre Yarimbiyik [and others] |
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Pubbl/distr/stampa |
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[Gaithersburg, MD] : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , [2006] |
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Descrizione fisica |
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1 online resource (21 unnumbered pages) : illustrations |
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Collana |
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Altri autori (Persone) |
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AllenRicky |
BlackburnDavid L |
SchafftHarry A |
YarimbiyikA. Emre |
ZaghloulM. E (Mona Elwakkad) |
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Soggetti |
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Nanoelectromechanical systems |
Thin films - Size effects - Computer simulation |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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"February 2006." |
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. |
Title from page [1], viewed March 7, 2007. |
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Nota di bibliografia |
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Includes bibliographical references. |
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