Control of mobile-ion contamination in oxidation ambients for MOS device processing / / Santos Mayo; Richard Y. Koyama; Thomas F. Leedy

• Record Nr.: UNINA9910709923703321
• Autore: Mayo Santos
• Pubbl/distr/stampa: Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1978
• Descrizione fisica: 1 online resource
• Collana: NBSIR ; ; 77-1404
• Altri autori (Persone): KoyamaRichard Y; LeedyThomas F; MayoSantos
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Note generali: 1978.; Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.; Title from PDF title page.
• Nota di bibliografia: Includes bibliographical references.