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Record Nr. |
UNINA9910709585603321 |
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Titolo |
Standard Reference Materials(R) User's Guide for RM 8096 and 8097 : The MEMS 5-in-1, 2013 Edition / / Janet M. Cassard ... [and others] |
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Pubbl/distr/stampa |
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Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 2013 |
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Descrizione fisica |
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1 online resource (224 pages) : illustrations (color) |
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Collana |
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NIST special publication ; ; 260-177 |
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Altri autori (Persone) |
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CassardJanet M |
GaitanMichael |
GeistJon |
ReadD. T |
SeilerDavid G |
VorburgerTheodore V |
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Soggetti |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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"February 2013." |
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. |
Title from PDF title page (viewed February 15, 2013). |
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Nota di bibliografia |
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Includes bibliographical references. |
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