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Record Nr. |
UNINA9910705874403321 |
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Autore |
Pantic Dragan M. |
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Titolo |
Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP / / Dragan M. Pantie [and four others] |
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Pubbl/distr/stampa |
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Cleveland, Ohio : , : National Aeronautics and Space Administration, Lewis Research Center, , [1990] |
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Descrizione fisica |
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1 online resource (15 pages) : illustrations |
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Collana |
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NASA technical memorandum ; ; 102544 |
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Soggetti |
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Capacitance-voltage characteristics |
Electron beams |
Indium phosphides |
Irradiation |
Phosphorus |
Plasmas (physics) |
Radiation damage |
Vapor deposition |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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"Performing organization: National Aeronautics and Space Administration, Lewis Research Center"--Report documentation page. |
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Nota di bibliografia |
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Includes bibliographical references (page 13). |
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