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Record Nr. |
UNINA9910701473803321 |
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Autore |
Zakar Eugene |
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Titolo |
Surface analysis of reactive ion etched PZT thin films in SF6 plasma [[electronic resource] /] / Eugene Zakar |
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Pubbl/distr/stampa |
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Adelphi, MD : , : Army Research Laboratory, , [2007] |
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Descrizione fisica |
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1 online resource (iv, 10 pages) : illustrations |
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Collana |
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Soggetti |
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Surfaces (Technology) - Analysis |
Thin films |
Piezoelectricity |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Title from title screen (viewed on Feb. 23, 2012). |
"September 2007." |
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Nota di bibliografia |
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Includes bibliographical references (pages 8-9). |
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