Pore characterization in low-k dielectric films using x-ray reflectivity [[electronic resource] ] : x-ray porosimetry / / Christopher L. Soles ... [and others]

• Record Nr.: UNINA9910699292203321
• Pubbl/distr/stampa: [Gaithersburg, Md.] : , : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, , [2004]
• Descrizione fisica: 1 online resource (xiii, 58 pages) : illustrations
• Collana: Special publication ; ; 960-13; NIST recommended practice guide
• Altri autori (Persone): SolesChristopher L
• Soggetti: Dielectric films; Porosity
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Note generali: Title from title screen (viewed on May 3, 2007).; "June 2004."
• Nota di bibliografia: Includes bibliographical references (pages 55-58).