1.

Record Nr.

UNINA9910699291703321

Autore

Snyder Chad R

Titolo

Capacitance cell measurement of the out-of-plane expansion of thin films [[electronic resource] /] / Chad R. Snyder, Frederick I. Mopsik

Pubbl/distr/stampa

[Gaithersburg, Md.] : , : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, , [2001]

Descrizione fisica

1 online resource (x, 32 pages) : illustrations

Collana

NIST special publication ; ; no. 960-7

NIST recommended practice guide

Altri autori (Persone)

MopsikF. I

Soggetti

Thin-film circuits

Thin films - Thermal properties

Expansion (Heat) - Measurement

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Title from title screen (viewed Apr. 19, 2011).

"November 2001."

"CODEN: NSPUE2."

Nota di bibliografia

Includes bibliographical references (pages 31-32).