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Record Nr. |
UNINA9910698628803321 |
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Autore |
Hirsch Samuel G. |
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Titolo |
A study on reactive ion etching of barium strontium titanate films using mixtures of argon (Ar), carbon tetrafluoride (CF4), and sulfur hexafluoride (SF6) / / Samuel G. Hirsch [and four others] |
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Pubbl/distr/stampa |
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Aberdeen Proving Ground, MD : , : Army Research Laboratory, , July 2014 |
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Descrizione fisica |
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1 online resource (iv, 7 pages) : illustrations |
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Collana |
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Soggetti |
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Semiconductors - Etching |
Varactors |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Title from title screen (viewed Sept. 29, 2015). |
"July 2014." |
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Nota di bibliografia |
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Includes bibliographical references. |
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