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Record Nr. |
UNINA9910697294203321 |
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Autore |
Polcawich Ronald G |
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Titolo |
A piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films [[electronic resource] /] / Ronald G. Polcawich |
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Pubbl/distr/stampa |
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Adelphi, MD : , : Army Research Laboratory, , [2004] |
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Descrizione fisica |
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1 online resource (vi, 20 pages) : illustrations (some color), charts (some color) |
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Collana |
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Soggetti |
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Microelectromechanical systems |
Microphone |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Title from PDF title screen (viewed on Aug. 10, 2010). |
"November 2004." |
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Nota di bibliografia |
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Includes bibliographical references (pages 17-18). |
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