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Record Nr. |
UNINA9910697126203321 |
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Autore |
Semendy Fred |
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Titolo |
Characterization of multi temperature and multi RF chuck power grown silicon nitride films by PECVD and ICP vapor deposiiton [[electronic resource] /] / F. Semedy ... [and others] |
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Pubbl/distr/stampa |
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Adelphi, MD : , : Army Resarch Laboratory, , [2010] |
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Descrizione fisica |
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1 online resource (vi, 14 pages) : color illustrations |
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Collana |
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Soggetti |
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Silicon nitride |
Chemical vapor deposition |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Title from PDF title screen (viewed on Aug. 6, 2010). |
"March 2010." |
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Nota di bibliografia |
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Includes bibliographical references (page 11). |
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