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Record Nr. |
UNINA9910697103903321 |
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Autore |
Semendy Fred |
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Titolo |
Etching characteristics and surface analysis of molecular bean epitaxy grown P-type aluminum gallium nitride with boron trichloride/chlorine gases in inductively coupled plasma (ICP) dry etching [[electronic resource] /] / Fred Semendy, Phillip Boyd, and Unchul Lee |
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Pubbl/distr/stampa |
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Adelphi, MD : , : Army Research Laboratory, , [2004] |
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Descrizione fisica |
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1 online resource (iv, 15 pages) : illustrations (chiefly color), color charts |
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Collana |
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Altri autori (Persone) |
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Soggetti |
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Plasma etching |
Gallium nitride |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Title from PDF title screen (viewed on Aug. 10, 2010). |
"November 2004." |
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Nota di bibliografia |
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Includes bibliographical references (pages 11-12). |
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