1.

Record Nr.

UNINA9910464872303321

Titolo

Next generation micro/nano systems : selected, peer reviewed papers from the Symposium E "Next Generation Micro/Nano Systems" of CIMTEC 2012 - 4th International Conference "Smart materials, Structures and Systems", held in Montecatini Terme, Italy, June 10-14, 2012 / / edited by Pietro Vincenzini, Leandro Lorenzelli

Pubbl/distr/stampa

Durnten-Zurich : , : Trans Tech Publications Ltd, , [2013]

©2013

ISBN

3-908158-89-3

Descrizione fisica

1 online resource (118 p.)

Collana

Advances in science and technology, , 1662-0356 ; ; v. 81

Altri autori (Persone)

VincenziniP. <1939->

LorenzelliLeandro

Disciplina

620.19

Soggetti

Smart materials

Smart structures

Electronic books.

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Description based upon print version of record.

Nota di bibliografia

Includes bibliographical references and indexes.

Nota di contenuto

Next Generation Micro/Nano Systems; Preface and Committees; Table of Contents; Chapter 1: Physical, Chemical and Optical MEMS; History and Recent Progress of MEMS Physical Sensors; Continuous Process for Large-Area Flexible MEMS; Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes; Micromachined Devices for Use in Terahertz Applications; Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon; Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method

Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An OverviewForeign Bodies - The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems; Chapter 2: Radiofrequency MEMS; Integrated Microsystems; RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems; Functional RF Devices



Powered by MEMS Technologies; Chapter 3: Micro(Nano) Fluidics; Microfluidic Microchemomechanical Systems; Hydrogel-Based Microfluidic Systems

Super-Hydrophilic PDMS and PET Surfaces for Microfluidic DevicesNew Viscosity Data for CuO-Water Nanofluid - The Hysteresis Phenomenon Revisited; Keywords Index; Authors Index

Sommario/riassunto

The 15 peer-reviewed papers collected here together offer a plenitude of up-to-date information on ""Next Generation Micro/Nano Systems"". The papers are conveniently arranged into: Chapter 1: Physical, Chemical and Optical MEMS, Chapter 2: Radiofrequency MEMS, Chapter 3: Micro/Nano Fluidics. Review from Book News Inc.: Once again the conference was broken down into 10 symposia and several focused and special sessions so the 800 papers had a little elbow room. The symposium documented here covered physical, chemical, and optical micro-electro-mechanical systems (MEMS); radiofrequency MEMS; and