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Record Nr. |
UNINA9910460580203321 |
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Autore |
Madou Marc J. |
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Titolo |
From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou |
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Pubbl/distr/stampa |
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Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 |
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ISBN |
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0-429-10921-0 |
1-4200-5518-6 |
1-4398-9524-4 |
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Edizione |
[Third edition.] |
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Descrizione fisica |
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1 online resource (642 p.) |
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Disciplina |
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Soggetti |
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Microelectromechanical systems |
Nanoelectromechanical systems |
Microfluidics |
Solid state physics |
Electronic books. |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Description based upon print version of record. |
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Nota di bibliografia |
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Includes bibliographical references at the end of each chapters. |
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Nota di contenuto |
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Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices |
Chapter 10: MEMS and NEMS ApplicationsBack Cover |
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Sommario/riassunto |
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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of |
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various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. |
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