1.

Record Nr.

UNISA996426332403316

Titolo

Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / / edited by Martin Feldman

Pubbl/distr/stampa

Philadelphia, PA : , : Woodhead Pub., , 2014

ISBN

0-85709-875-6

Descrizione fisica

1 online resource (599 p.)

Collana

Woodhead Publishing series in electronic and optical materials, , 2050-1501 ; ; number 42

Altri autori (Persone)

FeldmanMartin

Disciplina

621.381531

Soggetti

Nanolithography

Nanophotonics

Nanotechnology

Nanostructured materials - Design and construction

Electronic books.

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Description based upon print version of record.

Nota di bibliografia

Includes bibliographical references and index.

Nota di contenuto

Cover ; Nanolithography: The art of fabricating nanoelectronic and nanophotonic devices and systems ; Copyright ; Contents; Contributor contact details; Woodhead Publishing Series in Electronic and Optical Materials; Preface; 1: Optical projection lithography; 1.1 Introduction; 1.2 Lithography technology and trends; 1.3 Fundamentals of optical lithography; 1.4 Image evaluation; 1.5 Projection lithography systems; 1.6 Wavelengths for optical lithography; 1.7 Lithography in the deep ultraviolet (UV); 1.8 Resolution enhancement technology; 1.9 Immersion lithography

1.10 Multiple patterning optical lithography1.11 Conclusion; 1.12 References; 2: Extreme ultraviolet (EUV) lithography; 2.1 Introduction; 2.2 EUV sources; 2.3 EUV optics; 2.4 EUV masks; 2.5 EUV resists; 2.6 EUV integration and implementation challenges; 2.7 Conclusion and future trends; 2.8 Acknowledgments; 2.9 References; 3: Electron beam lithography; 3.1 Introduction; 3.2 Using pixel parallelism to address the throughput bottleneck; 3.3 The tradeoff between resolution and throughput; 3.4 Distributed systems; 3.5 Ultimate lithographic resolution



3.6 Electron-beam patterning of photomasks for optical lithography3.7 Conclusion; 3.8 Acknowledgements; 3.9 References; 4: Focused ion beams for nano-machining and imaging; 4.1 Introduction; 4.2 An adumbrated history of focused ion beams (FIBs); 4.3 Sources of ions: a quartet of types; 4.4 Charged particle optics; 4.5 Ion-matter interactions; 4.6 Milling; 4.7 Deposition; 4.8 Imaging; 4.9 Spectroscopy; 4.10 Conclusion and future trends; 4.11 References; 5: Masks for microand nanolithography; 5.1 Introduction; 5.2 Mask materials; 5.3 Mask process; 5.4 Mask metrology; 5.5 Defects and masks

5.6 Conclusion5.7 References; 6: Maskless photolithography; 6.1 Introduction; 6.2 The use of photons as opposed to charged particles; 6.3 Forms of maskless photolithography; 6.4 Zone-plate-array lithography (ZPAL); 6.5 Proximity-effect correction; 6.6 Extending the resolution of ZPAL; 6.7 Commercialization of ZPAL by LumArray, Inc.; 6.8 Conclusion; 6.9 References; 7: Chemistry and processing of resists for nanolithography; 7.1 Introduction; 7.2 Resists for optical lithography: synthesis and radiation induced chemistry of resists as a function of exposure technology

7.3 Chemically amplified resist process considerations7.4 Chemically amplified resists for 193 nm lithography; 7.5 Resists for extreme ultraviolet lithography (EUVL); 7.6 Resists for electron beam lithography; 7.7 Resists for selected forward looking lithographic technologies; 7.8 Resist resolution limitations; 7.9 Conclusion; 7.10 References; 8: Directed assembly nanolithography; 8.1 Introduction; 8.2 Block copolymers in lithography; 8.3 Directed self-assembly of block copolymers; 8.4 Programmable three-dimensional lithography; 8.5 Conclusion; 8.6 References; 9: Nanoimprint lithography

9.1 Introduction

Sommario/riassunto

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing - some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next?? and "How do we get there??Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the re



2.

Record Nr.

UNINA9910452760403321

Autore

Hume Robert J

Titolo

Courthouse democracy and minority rights [[electronic resource]] : same-sex marriage in the states / / Robert J. Hume

Pubbl/distr/stampa

Oxford, England, : Oxford University Press, c2013

ISBN

0-19-998239-2

Descrizione fisica

1 online resource (230 p.)

Disciplina

346.7301/68

Soggetti

Same-sex marriage - Law and legislation - United States - States

Political questions and judicial power - United States - States

Constitutional law - United States - States

Electronic books.

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Description based upon print version of record.

Nota di bibliografia

Includes bibliographical references and index.

Nota di contenuto

Cover; Contents; Preface; Table and Figures; PART I: INTRODUCTION; CHAPTER 1. Promises, Promises; CHAPTER 2. Understanding the Impact of State Supreme Courts; PART II: THE LEGAL CONTEXT; CHAPTER 3. Early Same-Sex Marriage Decisions; CHAPTER 4. Massachusetts and Beyond; PART III: AN ANALYSIS OF STATE JUDICIAL IMPACT; CHAPTER 5. Policy Initiation: The Diffusion of Same-Sex Marriage Cases across the States; CHAPTER 6. Policy Legitimation: Evaluating the Capacity of State Courts to Change Public Opinion

CHAPTER 7. Policy Endurance: The Enactment of State Constitutional Amendments Prohibiting Same-Sex MarriageCHAPTER 8. The Promise of State Courts; Bibliography; Table of Authorities; Index; A; B; C; D; E; F; G; H; I; J; K; L; M; N; O; P; Q; R; S; T; U; V; W

Sommario/riassunto

In Courthouse Democracy and Minority Rights: Same-Sex Marriage in the States, Robert J. Hume examines how the democratization of state courts and state constitutional systems has influenced the capacity of judges to protect minority rights. Through an intensive examination of same-sex marriage policy, Hume shows that democratic innovations like judicial elections and initiative amendment procedures have conditioned the impact of judges on state marriage laws. Using a combination of original and publicly available data, Hume demonstrates



that ""courthouse democracy"" has influenced the behavior

3.

Record Nr.

UNINA9910317814003321

Titolo

Difficulties in Cataract Surgery / / Artashes Zilfyan, editor

Pubbl/distr/stampa

London : , : IntechOpen, , [2018]

©2018

ISBN

1-83881-360-8

1-78923-257-0

Descrizione fisica

1 online resource (viii, 142 pages) : illustrations

Disciplina

617.742059

Soggetti

Cataract - Surgery

Eye - Diseases

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Nota di bibliografia

Includes bibliographical references and index.