1.

Record Nr.

UNINA9910451030803321

Autore

Santos Héctor J. de los

Titolo

Introduction to microelectromechanical microwave systems / / Héctor J. de los Santos

Pubbl/distr/stampa

Boston : , : Artech House, , ©2004

[Piscataqay, New Jersey] : , : IEEE Xplore, , [2004]

ISBN

1-58053-872-X

Edizione

[2nd ed.]

Descrizione fisica

1 online resource (235 p.)

Collana

Artech House MEMS and sensors library

Disciplina

621.381/3

Soggetti

Microwave devices

Microelectromechanical systems

Electronic books.

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Description based upon print version of record.

Nota di bibliografia

Includes bibliographical references and index.

Nota di contenuto

Introduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213

Sommario/riassunto

Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment.