1.

Record Nr.

UNINA9910437766803321

Autore

Doll Joseph C

Titolo

Piezoresistor design and applications / / Joseph C. Doll, Beth L. Pruitt

Pubbl/distr/stampa

New York : , : Springer, , 2013

ISBN

1-4614-8517-7

Edizione

[1st ed. 2013.]

Descrizione fisica

1 online resource (xi, 245 pages) : illustrations (some color)

Collana

Microsystems and Nanosystems, , 2198-0063

Disciplina

620.1

621.3815

Soggetti

Piezoelectric devices - Design and construction

Electric resistors

Microelectromechanical systems - Design and construction

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Description based upon print version of record.

Nota di bibliografia

Includes bibliographical references.

Nota di contenuto

Introduction -- Piezoresistance fundamentals -- Sensitivity, noise and resolution -- Fabrication and process modeling -- Temperature effects -- Design optimization -- Alternative materials and transduction methods.

Sommario/riassunto

This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators. This book also: ·         Demonstrates how the latest piezoresistor models and optimization techniques can be integrated for high performance piezoresistor design ·         Covers in detail piezoresistor sensitivity and noise models, signal conditioning, fabrication processes, low-power design and numerical optimization techniques ·         Provides an up-to-date discussion of alternative piezoresistive materials and MEMS transduction techniques ·         Explores in detail the tradeoffs in size, performance and complexity between piezoresistive sensing and popular alternatives (capacitive, piezoelectric and optical transduction) Piezoresistor Design and Applications addresses all aspects of piezoresistor design, fabrication, modeling and optimization and is an ideal book for MEMS



designers, process engineers and researchers.