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1. |
Record Nr. |
UNINA990006605580403321 |
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Titolo |
The decline of the South African economy / edited by Stuart Jones |
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Pubbl/distr/stampa |
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Cheltenham, UK ; Northampton, MA, USA : Edward Elgar, ©2002 |
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ISBN |
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Descrizione fisica |
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XVI, 238 p. : ill. ; 24 cm |
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Materiale a stampa |
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Livello bibliografico |
Monografia |
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2. |
Record Nr. |
UNINA9910367742803321 |
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Autore |
Koley Goutam |
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Titolo |
MEMS/NEMS Sensors: Fabrication and Application |
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Pubbl/distr/stampa |
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MDPI - Multidisciplinary Digital Publishing Institute, 2019 |
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ISBN |
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Descrizione fisica |
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1 online resource (242 p.) |
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Soggetti |
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History of engineering and technology |
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Materiale a stampa |
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Livello bibliografico |
Monografia |
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Sommario/riassunto |
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Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as |
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temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions. |
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