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1. |
Record Nr. |
UNINA9910350314603321 |
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Autore |
Tame Jeremy R. H |
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Titolo |
Approaches to Entropy [[electronic resource] /] / by Jeremy R. H. Tame |
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Pubbl/distr/stampa |
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Singapore : , : Springer Singapore : , : Imprint : Springer, , 2019 |
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ISBN |
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Descrizione fisica |
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1 online resource (203 pages) |
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Disciplina |
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Soggetti |
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Engineering |
Thermodynamics |
Biochemistry |
Hydraulic engineering |
Engineering Thermodynamics, Heat and Mass Transfer |
Biochemistry, general |
Engineering Fluid Dynamics |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Nota di contenuto |
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General thermodynamics -- Carnot and Clausius -- Maxwell and Boltzmann -- Gibbs -- Partition functions and ensembles -- Planck -- Einstein -- Shannon -- Nernst -- On Entropy as Mixed-up-ness -- Problems. |
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Sommario/riassunto |
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This is a book about thermodynamics, not history, but it adopts a semi-historical approach in order to highlight different approaches to entropy. The book does not follow a rigid temporal order of events, nor it is meant to be comprehensive. It includes solved examples for a solid understanding. The division into chapters under the names of key players in the development of the field is not intended to separate these individual contributions entirely, but to highlight their different approaches to entropy. This structure helps to provide a different view-point from other text-books on entropy. |
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2. |
Record Nr. |
UNISA996206300703316 |
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Titolo |
Journal of American & comparative cultures |
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Pubbl/distr/stampa |
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Bowling Green, OH, : American Culture Association, [2000-2002] |
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ISSN |
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Descrizione fisica |
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Disciplina |
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Soggetti |
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Popular culture - United States |
Civilization |
Popular culture |
Américanité |
Art américain |
Civilisation |
Culture américaine |
Culture populaire |
Histoire |
Littérature américaine |
Periodicals. |
Périodique électronique (Descripteur de forme) |
Ressource Internet (Descripteur de forme) |
United States Civilization Periodicals |
United States |
États-Unis |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Periodico |
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Note generali |
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Refereed/Peer-reviewed |
Title from issue table of contents (EbscoHost Website, viewed Oct. 30, 2003). |
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3. |
Record Nr. |
UNINA9910350221703321 |
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Autore |
Wang Guilei |
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Titolo |
Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond / / by Guilei Wang |
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Pubbl/distr/stampa |
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Singapore : , : Springer Singapore : , : Imprint : Springer, , 2019 |
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ISBN |
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Edizione |
[1st ed. 2019.] |
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Descrizione fisica |
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1 online resource (XVI, 115 p.) |
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Collana |
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Springer Theses, Recognizing Outstanding Ph.D. Research, , 2190-5053 |
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Disciplina |
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Soggetti |
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Semiconductors |
Electronic circuits |
Nanotechnology |
Circuits and Systems |
Nanotechnology and Microengineering |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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"Doctoral thesis accepted by Chinese Academy of Sciences, Beijing, China"--Title page. |
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Nota di bibliografia |
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Includes bibliographical references. |
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Nota di contenuto |
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Introduction -- Strain technology of Si-based materials -- SiGe Epitaxial Growth and material characterization -- SiGe Source and Drain Integration and transistor performance investigation -- Pattern Dependency behavior of SiGe Selective Epitaxy -- Summary and final words. |
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Sommario/riassunto |
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This thesis presents the SiGe source and drain (S/D) technology in the context of advanced CMOS, and addresses both device processing and epitaxy modelling. As the CMOS technology roadmap calls for continuously downscaling traditional transistor structures, controlling the parasitic effects of transistors, e.g. short channel effect, parasitic resistances and capacitances is becoming increasingly difficult. The emergence of these problems sparked a technological revolution, where a transition from planar to three-dimensional (3D) transistor design occurred in the 22nm technology node. The selective epitaxial growth (SEG) method has been used to deposit SiGe as stressor material in S/D regions to induce uniaxial strain in the channel region. The thesis investigates issues of process integration in IC production and concentrates on the key parameters of high-quality SiGe selective |
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epitaxial growth, with a special focus on its pattern dependency behavior and on key integration issues in both 2D and 3D transistor structures, the goal being to improve future applications of SiGe SEG in advanced CMOS. |
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