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1. |
Record Nr. |
UNINA9910350221703321 |
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Autore |
Wang Guilei |
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Titolo |
Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond / / by Guilei Wang |
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Pubbl/distr/stampa |
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Singapore : , : Springer Singapore : , : Imprint : Springer, , 2019 |
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ISBN |
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Edizione |
[1st ed. 2019.] |
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Descrizione fisica |
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1 online resource (XVI, 115 p.) |
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Collana |
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Springer Theses, Recognizing Outstanding Ph.D. Research, , 2190-5053 |
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Disciplina |
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Soggetti |
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Semiconductors |
Electronic circuits |
Nanotechnology |
Circuits and Systems |
Nanotechnology and Microengineering |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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"Doctoral thesis accepted by Chinese Academy of Sciences, Beijing, China"--Title page. |
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Nota di bibliografia |
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Includes bibliographical references. |
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Nota di contenuto |
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Introduction -- Strain technology of Si-based materials -- SiGe Epitaxial Growth and material characterization -- SiGe Source and Drain Integration and transistor performance investigation -- Pattern Dependency behavior of SiGe Selective Epitaxy -- Summary and final words. |
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Sommario/riassunto |
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This thesis presents the SiGe source and drain (S/D) technology in the context of advanced CMOS, and addresses both device processing and epitaxy modelling. As the CMOS technology roadmap calls for continuously downscaling traditional transistor structures, controlling the parasitic effects of transistors, e.g. short channel effect, parasitic resistances and capacitances is becoming increasingly difficult. The emergence of these problems sparked a technological revolution, where a transition from planar to three-dimensional (3D) transistor design occurred in the 22nm technology node. The selective epitaxial growth (SEG) method has been used to deposit SiGe as stressor material in S/D regions to induce uniaxial strain in the channel region. The thesis investigates issues of process integration in IC production and concentrates on the key parameters of high-quality SiGe selective |
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epitaxial growth, with a special focus on its pattern dependency behavior and on key integration issues in both 2D and 3D transistor structures, the goal being to improve future applications of SiGe SEG in advanced CMOS. |
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2. |
Record Nr. |
UNINA9910913786703321 |
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Autore |
Calabrò Francesco |
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Titolo |
Networks, Markets & People : Communities, Institutions and Enterprises Towards Post-humanism Epistemologies and AI Challenges, Volume 7 / / edited by Francesco Calabrò, Livia Madureira, Francesco Carlo Morabito, María José Piñeira Mantiñán |
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Pubbl/distr/stampa |
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Cham : , : Springer Nature Switzerland : , : Imprint : Springer, , 2024 |
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ISBN |
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Edizione |
[1st ed. 2024.] |
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Descrizione fisica |
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1 online resource (436 pages) |
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Collana |
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Lecture Notes in Networks and Systems, , 2367-3389 ; ; 1189 |
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Altri autori (Persone) |
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MadureiraLivia |
MorabitoF. C (Francesco Carlo) |
Piñeira MantiñánMaría José |
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Disciplina |
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Soggetti |
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Computational intelligence |
Regional economics |
Space in economics |
Computational Intelligence |
Regional and Spatial Economics |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Nota di contenuto |
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A new workflow for Human and Atmospheric Well being through Urban Regeneration Actions The study of the PNACC and the experimentation of climate simulations for the definition of Adaptive Technologies in the pre design phase -- WorkerBEE a 3D Modelling Tool for Climate Resilient Urban Development -- A distributed approach to Flood Risk Management through participation results from a literature review -- Stand Alone DC-MSs TS Fuzzy Systems for Regenerative Urban Design -- A new workflow for achieving climate neutrality in circular energy |
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clusters Simulations of regenerative design combining Nature Based Solutions and Solar Energy Technologies in urban environment -- Heat waves response strategies through technological approach for adaptation and mitigation in urban areas -- Human centred AI in the post optimisation regenerative process for climate scenarios -- A computational design approach for climate change adaptation and UHI mitigation -- Construction site risk assessment through digital twins for safety optimization -- From self-reliant to sufficiency design predictive and forecasting features of technology approach -- Territorial collaboration for the land take reduction and land use optimisation The case of the Territorial Coordination Plan of the Province of Lodi Italy -- Digital and circular innovation for Made in Italy wood supply chain the FoRWARD research project. |
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Sommario/riassunto |
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This book aims to address the issue of the effects that the contemporary environmental, technological, social and economic global challenges produce on settlement systems, communities, institutions and enterprises. It presents a multi-disciplinary scientific debate on the new frontiers of strategic and spatial planning, decision support tools and ecological design, within the urban-rural areas networks and the metropolitan cities of the Mediterranean basin. The book focuses on five topics: Cultural Heritage as driver of development for territories and tourism destinations; Ecosystems, people-nature cohesion and urban-rural relationships; Decision Support Systems for urban regeneration; Policies and practices of cohesion and social innovation for inclusive cities; Green buildings and sustainable solutions for ecological transition. In addition, the book hosts the papers of a special session intercluster promoted by Italian Society of Architectural Technology (SITdA). The book benefits all researchers, practitioners and policymakers interested in the issue applied to metropolitan cities and marginal areas. |
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