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Record Nr. |
UNINA9910337875803321 |
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Autore |
Rebohle Lars |
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Titolo |
Flash Lamp Annealing : From Basics to Applications / / by Lars Rebohle, Slawomir Prucnal, Denise Reichel |
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Pubbl/distr/stampa |
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Cham : , : Springer International Publishing : , : Imprint : Springer, , 2019 |
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ISBN |
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Edizione |
[1st ed. 2019.] |
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Descrizione fisica |
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1 online resource (xviii, 288 pages) |
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Collana |
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Springer Series in Materials Science, , 0933-033X ; ; 288 |
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Disciplina |
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Soggetti |
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Semiconductors |
Optical materials |
Electronic materials |
Manufactures |
Lasers |
Photonics |
Microwaves |
Optical engineering |
Nanotechnology |
Optical and Electronic Materials |
Manufacturing, Machines, Tools, Processes |
Optics, Lasers, Photonics, Optical Devices |
Microwaves, RF and Optical Engineering |
Nanotechnology and Microengineering |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Nota di bibliografia |
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Includes bibliographical references and index. |
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Nota di contenuto |
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Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible |
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Sommario/riassunto |
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This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users. |
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