| |
|
|
|
|
|
|
|
|
1. |
Record Nr. |
UNINA9910330349903321 |
|
|
Titolo |
2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS : 12-15 May 2019, Paris, France / / Institute of Electrical and Electronics Engineers |
|
|
|
|
|
|
|
Pubbl/distr/stampa |
|
|
Piscataway, New Jersey : , : Institute of Electrical and Electronics Engineers, , 2019 |
|
|
|
|
|
|
|
|
|
ISBN |
|
|
|
|
|
|
Descrizione fisica |
|
1 online resource (63 pages) |
|
|
|
|
|
|
Disciplina |
|
|
|
|
|
|
Soggetti |
|
Microelectronic packaging |
Microelectromechanical systems |
Micromachining |
|
|
|
|
|
|
|
|
Lingua di pubblicazione |
|
|
|
|
|
|
Formato |
Materiale a stampa |
|
|
|
|
|
Livello bibliografico |
Monografia |
|
|
|
|
| |