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Record Nr. |
UNINA9910299499303321 |
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Autore |
Demkov Alexander A |
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Titolo |
Integration of Functional Oxides with Semiconductors / / by Alexander A. Demkov, Agham B. Posadas |
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Pubbl/distr/stampa |
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New York, NY : , : Springer New York : , : Imprint : Springer, , 2014 |
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ISBN |
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Edizione |
[1st ed. 2014.] |
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Descrizione fisica |
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1 online resource (284 p.) |
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Collana |
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SpringerBriefs in Materials |
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Disciplina |
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537.622 |
620 |
620.11295 |
620.11297 |
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Soggetti |
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Electronics |
Microelectronics |
Optical materials |
Electronic materials |
Semiconductors |
Electronics and Microelectronics, Instrumentation |
Optical and Electronic Materials |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Description based upon print version of record. |
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Nota di bibliografia |
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Includes bibliographical references and index. |
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Nota di contenuto |
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Introduction -- Critical issues in Oxide-Semiconductor Heteroepitaxy -- Predictive Engineering of Semiconductor-Oxide Interfaces -- Crystalline Functional Oxide Growth Methods -- Thin Oxide Film Characterization Methods -- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy -- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates -- Other Epitaxial Oxides on Semiconductors -- Outlook and Parting Thoughts -- Appendices. |
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Sommario/riassunto |
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This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned |
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