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Record Nr. |
UNINA9910298598003321 |
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Autore |
Claeys Cor L |
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Titolo |
Metal Impurities in Silicon- and Germanium-Based Technologies : Origin, Characterization, Control, and Device Impact / / by Cor Claeys, Eddy Simoen |
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Pubbl/distr/stampa |
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Cham : , : Springer International Publishing : , : Imprint : Springer, , 2018 |
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ISBN |
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Edizione |
[1st ed. 2018.] |
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Descrizione fisica |
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1 online resource (XXXIII, 438 p. 215 illus., 207 illus. in color.) |
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Collana |
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Springer Series in Materials Science, , 0933-033X ; ; 270 |
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Disciplina |
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Soggetti |
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Optical materials |
Electronics - Materials |
Microwaves |
Optical engineering |
Semiconductors |
Electronic circuits |
Materials science |
Optical and Electronic Materials |
Microwaves, RF and Optical Engineering |
Electronic Circuits and Devices |
Characterization and Evaluation of Materials |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Nota di contenuto |
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Preface -- Introduction -- Basic Properties of Metals in Semiconductors -- Sources of Metals in Si and Ge Processing -- Characterization and Detection of Metals in Silicon and Germanium -- Electrical Activity of Metals in Si and Ge -- Impact of Metals on Silicon Devices and Circuits -- Gettering and Passivation of Metals in Silicon and Germanium -- Modeling and Simulation of Metals in Silicon and Germanium -- Conclusions. |
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Sommario/riassunto |
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This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important |
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metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on the electrical device performance. Several control and possible gettering approaches are addressed. The book is a reference for researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. It has an interdisciplinary nature by combining different disciplines such as material science, defect engineering, device processing, defect and device characterization and device physics and engineering. |
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