1.

Record Nr.

UNINA9910298461403321

Titolo

Subsecond annealing of advanced materials : annealing by lasers, flash lamps and swift heavy ions / / Wolfgang Skorupa, Heidemarie Schmidt, editors

Pubbl/distr/stampa

Cham [Switzerland] : , : Springer, , 2014

ISBN

3-319-03131-7

Edizione

[1st ed. 2014.]

Descrizione fisica

1 online resource (xvii, 321 pages) : illustrations (some color)

Collana

Springer Series in Materials Science, , 0933-033X ; ; 192

Disciplina

621.38152

Soggetti

Rapid thermal processing

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

"ISSN: 0933-033X."

Nota di bibliografia

Includes bibliographical references and index.

Nota di contenuto

From the Contents: The very early time -- Nanonet formation by constitutional supercooling of pulsed laser annealed, Mn-implanted germanium -- Metastable activation of dopants by solid phase epitaxial recrystallization -- Superconducting Ga-implanted Germanium -- Structural changes in SiGe/Si layers induced by fast crystallization.

Sommario/riassunto

The thermal processing of materials ranges from few femtoseconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials.