1.

Record Nr.

UNINA9910145767703321

Titolo

Microelectronic engineering

Pubbl/distr/stampa

Amsterdam, : Elsevier Science Pub. Co., 1983-

ISSN

1873-5568

Soggetti

Semiconductors - Design and construction

Semiconductor industry

Microelectronics

Nanoelectronics

Semiconductor industry - Periodicals

Semi-conducteurs - Conception et construction

Semi-conducteurs - Industrie - Périodiques

Semi-conducteurs - Industrie

Microélectronique

Nanoélectronique

Periodicals.

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Periodico

Note generali

Refereed/Peer-reviewed

Title from contents screen (ScienceDirect, viewed Nov. 4, 2005).