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1. |
Record Nr. |
UNINA9910144566803321 |
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Titolo |
Journal of vacuum science & technology . A Vacuum, surfaces, and films |
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Pubbl/distr/stampa |
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Woodbury, N.Y., : Published for the American Vacuum Society by the American Institute of Physics, [1983-] |
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ISSN |
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Disciplina |
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Soggetti |
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Vacuum technology |
Surfaces (Physics) |
Surface chemistry |
Thin films |
Vide (Technologie) |
Chimie des surfaces |
Surfaces (Physique) |
Couches minces |
Periodicals. |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Periodico |
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Note generali |
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Refereed/Peer-reviewed |
Title from PDF of issue table of contents (AIP, viewed Nov. 9, 2006). |
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