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Record Nr. |
UNINA9910143555103321 |
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Titolo |
Scanning Auger electron microscopy [[electronic resource] /] / [edited by] Martin Prutton, Mohamed M. El Gomati |
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Pubbl/distr/stampa |
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Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006 |
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ISBN |
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1-280-44912-8 |
9786610449125 |
0-470-34049-5 |
0-470-86679-9 |
0-470-86678-0 |
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Descrizione fisica |
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1 online resource (388 p.) |
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Altri autori (Persone) |
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PruttonM |
El GomatiMohamed M |
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Disciplina |
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Soggetti |
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Scanning Auger electron microscopy |
Electronic books. |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Description based upon print version of record. |
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Nota di bibliografia |
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Includes bibliographical references and index. |
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Nota di contenuto |
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Scanning Auger Electron Microscopy; Contents; List of Contributors; Preface; Acknowledgments; 1. Introduction; 2. The Auger Process; 3. Instrumentation; 4. The Spatial Resolution; 5. Forming an Auger Image; 6. Image Processing and Interpretation; 7. Quantification of Auger Images; 8. Applications: Materials Science; 9. Applications: Semiconductor Manufacturing; 10. Concluding Remarks; Author Index; Subject Index |
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Sommario/riassunto |
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This eagerly-awaited volume has been edited by two academic researchers with extensive and reputable experience in this field. Emphasis is given to the underlying science of the method of Auger microscopy, and its instrumental realization, the visualization and interpretation of the data in the sets of the images that form the output of the measurements and the methods used to quantify the images. Imaging artefacts in Auger microscopy and methods to correct them are also detailed. The authors describe the technique of Multi-Spectral |
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