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Record Nr. |
UNINA9910137041803321 |
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Titolo |
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference : 16-19 May 2016, Saratoga Springs, New York, USA / / Institute of Electrial and Electronics Engineers, Semiconductor Equipment and Materials International |
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Pubbl/distr/stampa |
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Piscataway, New Jersey : , : Institute of Electrical and Electronics Engineers, , 2016 |
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ISBN |
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Descrizione fisica |
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1 online resource (474 pages) |
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Disciplina |
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Soggetti |
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Semiconductors - Design and construction |
Semiconductor industry |
Process control |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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