Measurement technology for micro-nanometer devices / / Wendong Zhang [and eight others]

• Record Nr.: UNINA9910134877503321
• Pubbl/distr/stampa: Singapore : , : Wiley : , : National Defense Industry Press, , 2017; ©2017
• ISBN: 1-118-71797-X
• Descrizione fisica: 1 online resource (344 pages)
• Disciplina: 681/.2
• Soggetti: Microtechnology - Measurement; Nanotechnology - Measurement; Microelectromechanical systems - Testing; Physical measurements; Electronic books.
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Nota di bibliografia: Includes bibliographical references at the end of each chapters and index.